implant
| Option | Type | Default | Description |
|---|---|---|---|
| opt | Switch | major implant command options | |
| work | Boolean | 1 | perform an implant |
| table | Boolean | 0 | define the table location for an implant |
| query | Boolean | 0 | return implant parameters |
| build | Boolean | 0 | build an implanter with user defined params |
| sol | Switch | solution specification | |
| Boron | Boolean | 0 | a solution |
| boron | Boolean | 0 | a solution |
| Phosphorus | Boolean | 0 | a solution |
| phos | Boolean | 0 | a solution |
| phosphorus | Boolean | 0 | a solution |
| Phos | Boolean | 0 | a solution |
| Arsenic | Boolean | 0 | a solution |
| arsenic | Boolean | 0 | a solution |
| Antimony | Boolean | 0 | a solution |
| antimony | Boolean | 0 | a solution |
| Carbon | Boolean | 0 | a solution |
| carbon | Boolean | 0 | a solution |
| Fluorine | Boolean | 0 | a solution |
| fluorine | Boolean | 0 | a solution |
| Indium | Boolean | 0 | a solution |
| indium | Boolean | 0 | a solution |
| Germanium | Boolean | 0 | a solution |
| germanium | Boolean | 0 | a solution |
| Nitrogen | Boolean | 0 | a solution |
| nitrogen | Boolean | 0 | a solution |
| Oxygen | Boolean | 0 | a solution |
| oxygen | Boolean | 0 | a solution |
| Argon | Boolean | 0 | a solution |
| argon | Boolean | 0 | a solution |
| bf2 | Boolean | 0 | implant BF2 molecules into the Boron field (analytic tables at atm=49; monte dissociates the molecule at the surface and transports the fragments) |
| atm | Int | 0 | override the default atomic mass of the implanted isotope |
| mater | Switch | material specification | |
| Gas | Boolean | 0 | a material |
| gas | Boolean | 0 | a material |
| SiO2 | Boolean | 0 | a material |
| sio2 | Boolean | 0 | a material |
| Oxide | Boolean | 0 | a material |
| oxide | Boolean | 0 | a material |
| SpOx | Boolean | 0 | a material |
| GateOx | Boolean | 0 | a material |
| HfO2 | Boolean | 0 | a material |
| hfo2 | Boolean | 0 | a material |
| Si3N4 | Boolean | 0 | a material |
| si3n4 | Boolean | 0 | a material |
| Nitride | Boolean | 0 | a material |
| nitride | Boolean | 0 | a material |
| Silicon | Boolean | 0 | a material |
| silicon | Boolean | 0 | a material |
| Si | Boolean | 0 | a material |
| Germanium | Boolean | 0 | a material |
| Germanium | Boolean | 0 | a material |
| Ge | Boolean | 0 | a material |
| SiGe | Boolean | 0 | a material |
| sige | Boolean | 0 | a material |
| SiliconGermaniu | Boolean | 0 | a material |
| SiliconGe | Boolean | 0 | a material |
| SiGermanium | Boolean | 0 | a material |
| 4HSiC | Boolean | 0 | a material |
| 4hsic | Boolean | 0 | a material |
| 6HSiC | Boolean | 0 | a material |
| 6hsic | Boolean | 0 | a material |
| 3CSiC | Boolean | 0 | a material |
| 3csic | Boolean | 0 | a material |
| GaN | Boolean | 0 | a material |
| gan | Boolean | 0 | a material |
| AlGaN | Boolean | 0 | a material |
| algan | Boolean | 0 | a material |
| AlN | Boolean | 0 | a material |
| aln | Boolean | 0 | a material |
| Polysilicon | Boolean | 0 | a material |
| poly | Boolean | 0 | a material |
| Poly | Boolean | 0 | a material |
| polySilicon | Boolean | 0 | a material |
| PolySilicon | Boolean | 0 | a material |
| polySi | Boolean | 0 | a material |
| PolySi | Boolean | 0 | a material |
| Polysi | Boolean | 0 | a material |
| Oxynitride | Boolean | 0 | a material |
| oxynitride | Boolean | 0 | a material |
| Photoresist | Boolean | 0 | a material |
| PR | Boolean | 0 | a material |
| pr | Boolean | 0 | a material |
| photoresist | Boolean | 0 | a material |
| Metal | Boolean | 0 | a material |
| metal | Boolean | 0 | a material |
| Niobium | Boolean | 0 | a material |
| Nb | Boolean | 0 | a material |
| niobium | Boolean | 0 | a material |
| niob | Boolean | 0 | a material |
| NiobiumOxide | Boolean | 0 | a material |
| NbOx | Boolean | 0 | a material |
| nioboxide | Boolean | 0 | a material |
| niobOxide | Boolean | 0 | a material |
| niobiumOxide | Boolean | 0 | a material |
| niobiumoxide | Boolean | 0 | a material |
| Aluminum | Boolean | 0 | a material |
| Al | Boolean | 0 | a material |
| Alum | Boolean | 0 | a material |
| alum | Boolean | 0 | a material |
| aluminum | Boolean | 0 | a material |
| AluminumOxide | Boolean | 0 | a material |
| AlOx | Boolean | 0 | a material |
| alumoxide | Boolean | 0 | a material |
| alumOxide | Boolean | 0 | a material |
| aluminumOxide | Boolean | 0 | a material |
| aluminumoxide | Boolean | 0 | a material |
| semi | Boolean | 0 | a material |
| Invisible | Boolean | 0 | a material |
| Insulator | Boolean | 0 | a material |
| mod | Switch | what model this file is used for | |
| pearson | Boolean | ||
| gaussian | Boolean | ||
| tasch | Boolean | ||
| dualpearson | Boolean | ||
| monte | Boolean | ||
| min.conc | Float | 1.000000e+10 | minimum concentration to use |
| range | Float | 0.000000e+00 | projected range |
| standard | Float | 1.000000e-01 | standard deviation |
| file | String | data file location | |
| energy | Float | 0.000000e+00 | energy in keV |
| dose | Float | 0.000000e+00 | dose in cm-2 |
| tilt | Float | 0.000000e+00 | wafer tilt to beam |
| rotation | Float | 0.000000e+00 | wafer rotation |
| nions | Int | 10000 | number of ions to simulate (monte only) |
| rngseed | Int | 12345 | random seed for the Monte Carlo implant (monte only) |
| crystal | Boolean | 0 | crystalline (channeling) silicon target instead of amorphous (monte only) |
| damage | Boolean | 1 | monte crystal: Kinchin-Pease damage feedback, dose-dependent dechanneling (on by default). Analytic implant: deposit "+1" excess interstitials into the Int solution -- one per implanted ion, with the ion's own profile. OFF unless the keyword is given |
| temp | Float | 3.000000e+02 | wafer temperature in K, sets the thermal displacement amplitudes (monte only) |
| dump | String | monte only: write the raw stopping distribution to this file -- a provenance header line then one "depth lateral weight" line per tallied ion, lengths in the deck's length unit. The reported moments and quantiles are exactly the reduction of this file, so a table row can be re-fitted offline instead of re-simulating the ions. Deposits and printed numbers are unchanged | |
| mask | String | mask for the implant | |
| masklike | Boolean | 0 | treat a material with no registered analytic table as a dense stopping mask: it receives no dose and nothing passes through it. Without this keyword a missing <Species><Material> table is an error -- generate the table with a BCA run instead |
Raw -help output
implant Length Scale Default is microns which can be changed with the option command Name Type Default Information opt Switch major implant command options work Boolean 1 perform an implant table Boolean 0 define the table location for an implant query Boolean 0 return implant parameters build Boolean 0 build an implanter with user defined params sol Switch solution specification Boron Boolean 0 a solution boron Boolean 0 a solution Phosphorus Boolean 0 a solution phos Boolean 0 a solution phosphorus Boolean 0 a solution Phos Boolean 0 a solution Arsenic Boolean 0 a solution arsenic Boolean 0 a solution Antimony Boolean 0 a solution antimony Boolean 0 a solution Carbon Boolean 0 a solution carbon Boolean 0 a solution Fluorine Boolean 0 a solution fluorine Boolean 0 a solution Indium Boolean 0 a solution indium Boolean 0 a solution Germanium Boolean 0 a solution germanium Boolean 0 a solution Nitrogen Boolean 0 a solution nitrogen Boolean 0 a solution Oxygen Boolean 0 a solution oxygen Boolean 0 a solution Argon Boolean 0 a solution argon Boolean 0 a solution bf2 Boolean 0 implant BF2 molecules into the Boron field (analytic tables at atm=49; monte dissociates the molecule at the surface and transports the fragments) atm Int 0 override the default atomic mass of the implanted isotope mater Switch material specification Gas Boolean 0 a material gas Boolean 0 a material SiO2 Boolean 0 a material sio2 Boolean 0 a material Oxide Boolean 0 a material oxide Boolean 0 a material SpOx Boolean 0 a material GateOx Boolean 0 a material HfO2 Boolean 0 a material hfo2 Boolean 0 a material Si3N4 Boolean 0 a material si3n4 Boolean 0 a material Nitride Boolean 0 a material nitride Boolean 0 a material Silicon Boolean 0 a material silicon Boolean 0 a material Si Boolean 0 a material Germanium Boolean 0 a material Germanium Boolean 0 a material Ge Boolean 0 a material SiGe Boolean 0 a material sige Boolean 0 a material SiliconGermanium Boolean 0 a material SiliconGe Boolean 0 a material SiGermanium Boolean 0 a material 4HSiC Boolean 0 a material 4hsic Boolean 0 a material 6HSiC Boolean 0 a material 6hsic Boolean 0 a material 3CSiC Boolean 0 a material 3csic Boolean 0 a material GaN Boolean 0 a material gan Boolean 0 a material AlGaN Boolean 0 a material algan Boolean 0 a material AlN Boolean 0 a material aln Boolean 0 a material Polysilicon Boolean 0 a material poly Boolean 0 a material Poly Boolean 0 a material polySilicon Boolean 0 a material PolySilicon Boolean 0 a material polySi Boolean 0 a material PolySi Boolean 0 a material Polysi Boolean 0 a material Oxynitride Boolean 0 a material oxynitride Boolean 0 a material Photoresist Boolean 0 a material PR Boolean 0 a material pr Boolean 0 a material photoresist Boolean 0 a material Metal Boolean 0 a material metal Boolean 0 a material Niobium Boolean 0 a material Nb Boolean 0 a material niobium Boolean 0 a material niob Boolean 0 a material NiobiumOxide Boolean 0 a material NbOx Boolean 0 a material nioboxide Boolean 0 a material niobOxide Boolean 0 a material niobiumOxide Boolean 0 a material niobiumoxide Boolean 0 a material Aluminum Boolean 0 a material Al Boolean 0 a material Alum Boolean 0 a material alum Boolean 0 a material aluminum Boolean 0 a material AluminumOxide Boolean 0 a material AlOx Boolean 0 a material alumoxide Boolean 0 a material alumOxide Boolean 0 a material aluminumOxide Boolean 0 a material aluminumoxide Boolean 0 a material semi Boolean 0 a material Invisible Boolean 0 a material Insulator Boolean 0 a material mod Switch what model this file is used for pearson Boolean gaussian Boolean tasch Boolean dualpearson Boolean monte Boolean min.conc Float 1.000000e+10 minimum concentration to use range Float 0.000000e+00 projected range standard Float 1.000000e-01 standard deviation file String data file location energy Float 0.000000e+00 energy in keV dose Float 0.000000e+00 dose in cm-2 tilt Float 0.000000e+00 wafer tilt to beam rotation Float 0.000000e+00 wafer rotation nions Int 10000 number of ions to simulate (monte only) rngseed Int 12345 random seed for the Monte Carlo implant (monte only) crystal Boolean 0 crystalline (channeling) silicon target instead of amorphous (monte only) damage Boolean 1 monte crystal: Kinchin-Pease damage feedback, dose-dependent dechanneling (on by default). Analytic implant: deposit "+1" excess interstitials into the Int solution -- one per implanted ion, with the ion's own profile. OFF unless the keyword is given temp Float 3.000000e+02 wafer temperature in K, sets the thermal displacement amplitudes (monte only) dump String monte only: write the raw stopping distribution to this file -- a provenance header line then one "depth lateral weight" line per tallied ion, lengths in the deck's length unit. The reported moments and quantiles are exactly the reduction of this file, so a table row can be re-fitted offline instead of re-simulating the ions. Deposits and printed numbers are unchanged mask String mask for the implant masklike Boolean 0 treat a material with no registered analytic table as a dense stopping mask: it receives no dose and nothing passes through it. Without this keyword a missing <Species><Material> table is an error -- generate the table with a BCA run instead
Examples:
Test/Coverage/cov_deposit_spacing_implant.tclTest/Coverage/cov_implant_alloy_moments.tclTest/Coverage/cov_implant_below_table.tclTest/Coverage/cov_implant_cv_average.tclTest/Coverage/cov_implant_cv_surface.tcl