| list |
Boolean |
0 |
list machines |
| clear |
Boolean |
0 |
clear machines |
| name |
String |
|
machine name |
| voltage |
Float |
5.000000e+00 |
electrode potential of the plasma etch system |
| ion_neutral_rat |
o Float |
1.000000e-02 |
concentration of ion:neutral flux ratio |
| reflected |
Boolean |
0 |
compute reflected neutrals? |
| speed |
Float |
6.000000e-01 |
speed at which CMP pad scrubs the wafer (m/s) |
| depthfactor |
Float |
1.000000e+00 |
Characteristic length factor that accounts for the fall of pressure from top of feature to bottom |
| MD |
Boolean |
0 |
molecular dynamics based target flux distribution |
| 3D |
Boolean |
0 |
run quasi-3D simulation assuming axisymmetry |
| surf_roughness |
Boolean |
0 |
add surface roughness using a simple harmonic function during sputtering |
| targetHeight |
Float |
8.000000e+00 |
distance between target and substrate in cm |
| targetDiameter |
Float |
3.400000e+01 |
target diameter in cm |
| alagator |
Boolean |
0 |
alagator velocity |
| rate |
String |
0.0 |
rate default units/min |
| pressure |
Float |
1.800000e+04 |
pressure applied at pad or in chamber in Pa |
| angular |
Float |
1.000000e+01 |
angular distribution full width half max in degrees |
| sp1 |
Float |
1.000000e+00 |
primary sticking probability |
| sp2 |
Float |
9.000000e-01 |
secondary sticking probability |
| store |
String |
|
name to store the rate for this machine |
| dataspace |
Float |
1.000000e-02 |
spacing for data to drop across the deposit |
| type |
Switch |
|
Type |
| isotropic |
Boolean |
0 |
iso etch |
| oldaniso |
Boolean |
0 |
aniso etch |
| aniso |
Boolean |
0 |
aniso etch |
| pecvd |
Boolean |
0 |
plasma enhanced CVD |
| plasma |
Boolean |
0 |
plasma etch |
| cmp |
Boolean |
0 |
chemical mechanical polish |
| sputter |
Boolean |
0 |
sputter deposition |
| arate |
String |
1 |
Alagator string to compute rate |
| EtchOrDep |
Switch |
|
etching or deposition |
| etch |
Boolean |
0 |
etch |
| deposit |
Boolean |
0 |
deposit |
| mater |
Switch |
|
material specification |
| Gas |
Boolean |
0 |
a material |
| gas |
Boolean |
0 |
a material |
| SiO2 |
Boolean |
0 |
a material |
| sio2 |
Boolean |
0 |
a material |
| Oxide |
Boolean |
0 |
a material |
| oxide |
Boolean |
0 |
a material |
| SpOx |
Boolean |
0 |
a material |
| GateOx |
Boolean |
0 |
a material |
| HfO2 |
Boolean |
0 |
a material |
| hfo2 |
Boolean |
0 |
a material |
| Si3N4 |
Boolean |
0 |
a material |
| si3n4 |
Boolean |
0 |
a material |
| Nitride |
Boolean |
0 |
a material |
| nitride |
Boolean |
0 |
a material |
| Silicon |
Boolean |
0 |
a material |
| silicon |
Boolean |
0 |
a material |
| Si |
Boolean |
0 |
a material |
| Germanium |
Boolean |
0 |
a material |
| Germanium |
Boolean |
0 |
a material |
| Ge |
Boolean |
0 |
a material |
| SiGe |
Boolean |
0 |
a material |
| sige |
Boolean |
0 |
a material |
| SiliconGermaniu |
Boolean |
0 |
a material |
| SiliconGe |
Boolean |
0 |
a material |
| SiGermanium |
Boolean |
0 |
a material |
| 4HSiC |
Boolean |
0 |
a material |
| 4hsic |
Boolean |
0 |
a material |
| 6HSiC |
Boolean |
0 |
a material |
| 6hsic |
Boolean |
0 |
a material |
| 3CSiC |
Boolean |
0 |
a material |
| 3csic |
Boolean |
0 |
a material |
| GaN |
Boolean |
0 |
a material |
| gan |
Boolean |
0 |
a material |
| AlGaN |
Boolean |
0 |
a material |
| algan |
Boolean |
0 |
a material |
| AlN |
Boolean |
0 |
a material |
| aln |
Boolean |
0 |
a material |
| Polysilicon |
Boolean |
0 |
a material |
| poly |
Boolean |
0 |
a material |
| Poly |
Boolean |
0 |
a material |
| polySilicon |
Boolean |
0 |
a material |
| PolySilicon |
Boolean |
0 |
a material |
| polySi |
Boolean |
0 |
a material |
| PolySi |
Boolean |
0 |
a material |
| Polysi |
Boolean |
0 |
a material |
| Oxynitride |
Boolean |
0 |
a material |
| oxynitride |
Boolean |
0 |
a material |
| Photoresist |
Boolean |
0 |
a material |
| PR |
Boolean |
0 |
a material |
| pr |
Boolean |
0 |
a material |
| photoresist |
Boolean |
0 |
a material |
| Metal |
Boolean |
0 |
a material |
| metal |
Boolean |
0 |
a material |
| Niobium |
Boolean |
0 |
a material |
| Nb |
Boolean |
0 |
a material |
| niobium |
Boolean |
0 |
a material |
| niob |
Boolean |
0 |
a material |
| NiobiumOxide |
Boolean |
0 |
a material |
| NbOx |
Boolean |
0 |
a material |
| nioboxide |
Boolean |
0 |
a material |
| niobOxide |
Boolean |
0 |
a material |
| niobiumOxide |
Boolean |
0 |
a material |
| niobiumoxide |
Boolean |
0 |
a material |
| Aluminum |
Boolean |
0 |
a material |
| Al |
Boolean |
0 |
a material |
| Alum |
Boolean |
0 |
a material |
| alum |
Boolean |
0 |
a material |
| aluminum |
Boolean |
0 |
a material |
| AluminumOxide |
Boolean |
0 |
a material |
| AlOx |
Boolean |
0 |
a material |
| alumoxide |
Boolean |
0 |
a material |
| alumOxide |
Boolean |
0 |
a material |
| aluminumOxide |
Boolean |
0 |
a material |
| aluminumoxide |
Boolean |
0 |
a material |
| semi |
Boolean |
0 |
a material |
| Invisible |
Boolean |
0 |
a material |
| Insulator |
Boolean |
0 |
a material |