implant
| Option | Type | Default | Description |
|---|---|---|---|
| opt | Switch | major implant command options | |
| work | Boolean | 1 | perform an implant |
| table | Boolean | 0 | define the table location for an implant |
| query | Boolean | 0 | return implant parameters |
| build | Boolean | 0 | build an implanter with user defined params |
| sol | Switch | solution specification | |
| Boron | Boolean | 0 | a solution |
| boron | Boolean | 0 | a solution |
| Phosphorus | Boolean | 0 | a solution |
| phos | Boolean | 0 | a solution |
| phosphorus | Boolean | 0 | a solution |
| Phos | Boolean | 0 | a solution |
| Arsenic | Boolean | 0 | a solution |
| arsenic | Boolean | 0 | a solution |
| Antimony | Boolean | 0 | a solution |
| antimony | Boolean | 0 | a solution |
| Carbon | Boolean | 0 | a solution |
| carbon | Boolean | 0 | a solution |
| Fluorine | Boolean | 0 | a solution |
| fluorine | Boolean | 0 | a solution |
| Indium | Boolean | 0 | a solution |
| indium | Boolean | 0 | a solution |
| bf2 | Boolean | 0 | bf2 |
| atm | Int | 0 | override the default atomic mass of the implanted isotope |
| mater | Switch | material specification | |
| Gas | Boolean | 0 | a material |
| gas | Boolean | 0 | a material |
| SiO2 | Boolean | 0 | a material |
| sio2 | Boolean | 0 | a material |
| Oxide | Boolean | 0 | a material |
| oxide | Boolean | 0 | a material |
| SpOx | Boolean | 0 | a material |
| GateOx | Boolean | 0 | a material |
| HfO2 | Boolean | 0 | a material |
| hfo2 | Boolean | 0 | a material |
| Si3N4 | Boolean | 0 | a material |
| si3n4 | Boolean | 0 | a material |
| Nitride | Boolean | 0 | a material |
| nitride | Boolean | 0 | a material |
| Silicon | Boolean | 0 | a material |
| silicon | Boolean | 0 | a material |
| Si | Boolean | 0 | a material |
| Germanium | Boolean | 0 | a material |
| Germanium | Boolean | 0 | a material |
| Ge | Boolean | 0 | a material |
| SiGe | Boolean | 0 | a material |
| sige | Boolean | 0 | a material |
| SiliconGermaniu | Boolean | 0 | a material |
| SiliconGe | Boolean | 0 | a material |
| SiGermanium | Boolean | 0 | a material |
| 4HSiC | Boolean | 0 | a material |
| 4hsic | Boolean | 0 | a material |
| 6HSiC | Boolean | 0 | a material |
| 6hsic | Boolean | 0 | a material |
| 3CSiC | Boolean | 0 | a material |
| 3csic | Boolean | 0 | a material |
| GaN | Boolean | 0 | a material |
| gan | Boolean | 0 | a material |
| AlGaN | Boolean | 0 | a material |
| algan | Boolean | 0 | a material |
| AlN | Boolean | 0 | a material |
| aln | Boolean | 0 | a material |
| Polysilicon | Boolean | 0 | a material |
| poly | Boolean | 0 | a material |
| Poly | Boolean | 0 | a material |
| polySilicon | Boolean | 0 | a material |
| PolySilicon | Boolean | 0 | a material |
| polySi | Boolean | 0 | a material |
| PolySi | Boolean | 0 | a material |
| Polysi | Boolean | 0 | a material |
| Oxynitride | Boolean | 0 | a material |
| oxynitride | Boolean | 0 | a material |
| Photoresist | Boolean | 0 | a material |
| PR | Boolean | 0 | a material |
| pr | Boolean | 0 | a material |
| photoresist | Boolean | 0 | a material |
| Metal | Boolean | 0 | a material |
| metal | Boolean | 0 | a material |
| Niobium | Boolean | 0 | a material |
| Nb | Boolean | 0 | a material |
| niobium | Boolean | 0 | a material |
| niob | Boolean | 0 | a material |
| NiobiumOxide | Boolean | 0 | a material |
| NbOx | Boolean | 0 | a material |
| nioboxide | Boolean | 0 | a material |
| niobOxide | Boolean | 0 | a material |
| niobiumOxide | Boolean | 0 | a material |
| niobiumoxide | Boolean | 0 | a material |
| Aluminum | Boolean | 0 | a material |
| Al | Boolean | 0 | a material |
| Alum | Boolean | 0 | a material |
| alum | Boolean | 0 | a material |
| aluminum | Boolean | 0 | a material |
| AluminumOxide | Boolean | 0 | a material |
| AlOx | Boolean | 0 | a material |
| alumoxide | Boolean | 0 | a material |
| alumOxide | Boolean | 0 | a material |
| aluminumOxide | Boolean | 0 | a material |
| aluminumoxide | Boolean | 0 | a material |
| semi | Boolean | 0 | a material |
| Invisible | Boolean | 0 | a material |
| Insulator | Boolean | 0 | a material |
| mod | Switch | what model this file is used for | |
| pearson | Boolean | ||
| gaussian | Boolean | ||
| tasch | Boolean | ||
| dualpearson | Boolean | ||
| min.conc | Float | 1.000000e+10 | minimum concentration to use |
| range | Float | 0.000000e+00 | projected range |
| standard | Float | 1.000000e-01 | standard deviation |
| file | String | data file location | |
| energy | Float | 0.000000e+00 | energy in keV |
| dose | Float | 0.000000e+00 | dose in cm-2 |
| tilt | Float | 0.000000e+00 | wafer tilt to beam |
| rotation | Float | 0.000000e+00 | wafer rotation |
| mask | String | mask for the implant |
Raw -help output
implant Length Scale Default is microns which can be changed with the option command Name Type Default Information opt Switch major implant command options work Boolean 1 perform an implant table Boolean 0 define the table location for an implant query Boolean 0 return implant parameters build Boolean 0 build an implanter with user defined params sol Switch solution specification Boron Boolean 0 a solution boron Boolean 0 a solution Phosphorus Boolean 0 a solution phos Boolean 0 a solution phosphorus Boolean 0 a solution Phos Boolean 0 a solution Arsenic Boolean 0 a solution arsenic Boolean 0 a solution Antimony Boolean 0 a solution antimony Boolean 0 a solution Carbon Boolean 0 a solution carbon Boolean 0 a solution Fluorine Boolean 0 a solution fluorine Boolean 0 a solution Indium Boolean 0 a solution indium Boolean 0 a solution bf2 Boolean 0 bf2 atm Int 0 override the default atomic mass of the implanted isotope mater Switch material specification Gas Boolean 0 a material gas Boolean 0 a material SiO2 Boolean 0 a material sio2 Boolean 0 a material Oxide Boolean 0 a material oxide Boolean 0 a material SpOx Boolean 0 a material GateOx Boolean 0 a material HfO2 Boolean 0 a material hfo2 Boolean 0 a material Si3N4 Boolean 0 a material si3n4 Boolean 0 a material Nitride Boolean 0 a material nitride Boolean 0 a material Silicon Boolean 0 a material silicon Boolean 0 a material Si Boolean 0 a material Germanium Boolean 0 a material Germanium Boolean 0 a material Ge Boolean 0 a material SiGe Boolean 0 a material sige Boolean 0 a material SiliconGermanium Boolean 0 a material SiliconGe Boolean 0 a material SiGermanium Boolean 0 a material 4HSiC Boolean 0 a material 4hsic Boolean 0 a material 6HSiC Boolean 0 a material 6hsic Boolean 0 a material 3CSiC Boolean 0 a material 3csic Boolean 0 a material GaN Boolean 0 a material gan Boolean 0 a material AlGaN Boolean 0 a material algan Boolean 0 a material AlN Boolean 0 a material aln Boolean 0 a material Polysilicon Boolean 0 a material poly Boolean 0 a material Poly Boolean 0 a material polySilicon Boolean 0 a material PolySilicon Boolean 0 a material polySi Boolean 0 a material PolySi Boolean 0 a material Polysi Boolean 0 a material Oxynitride Boolean 0 a material oxynitride Boolean 0 a material Photoresist Boolean 0 a material PR Boolean 0 a material pr Boolean 0 a material photoresist Boolean 0 a material Metal Boolean 0 a material metal Boolean 0 a material Niobium Boolean 0 a material Nb Boolean 0 a material niobium Boolean 0 a material niob Boolean 0 a material NiobiumOxide Boolean 0 a material NbOx Boolean 0 a material nioboxide Boolean 0 a material niobOxide Boolean 0 a material niobiumOxide Boolean 0 a material niobiumoxide Boolean 0 a material Aluminum Boolean 0 a material Al Boolean 0 a material Alum Boolean 0 a material alum Boolean 0 a material aluminum Boolean 0 a material AluminumOxide Boolean 0 a material AlOx Boolean 0 a material alumoxide Boolean 0 a material alumOxide Boolean 0 a material aluminumOxide Boolean 0 a material aluminumoxide Boolean 0 a material semi Boolean 0 a material Invisible Boolean 0 a material Insulator Boolean 0 a material mod Switch what model this file is used for pearson Boolean gaussian Boolean tasch Boolean dualpearson Boolean min.conc Float 1.000000e+10 minimum concentration to use range Float 0.000000e+00 projected range standard Float 1.000000e-01 standard deviation file String data file location energy Float 0.000000e+00 energy in keV dose Float 0.000000e+00 dose in cm-2 tilt Float 0.000000e+00 wafer tilt to beam rotation Float 0.000000e+00 wafer rotation mask String mask for the implant
Examples:
Test/Coverage/cov_implant_profile.tclTest/Coverage/cov_implant_variance.tclTest/Coverage/cov_mosfet_process.tclTest/Coverage/cov_tasch_implant.tclTest/Coverage/implant_basic.tcl